Fabrication of new single-walled carbon nanotubes microelectrode for electrochemical sensors application

In this paper, we describe two simple different ways to fabricate an array of single-walled carbon nanotubes (SWCNT) microelectrodes from SWCNT network, grown on Si substrate, through micro-fabrication process. Two kinds of material, photoresist – organic compound and sputtered SiO2, were used as an insulator layer for these arrays of SWCNT microelectrodes. The SWCNT microelectrodes were characterized by scanning electron microscopy (SEM), Raman spectroscopy, and electrochemical measurements. The SWCNT microelectrodes with sputtered SiO2 as an insulator exhibit some prior advances to these used photoresist layer as insulator such as much stable in harsh condition (high active organic solvents) and high current density (24.94 μA mm−2 compared to 2.69 μA mm−2, respectively). In addition, the well-defined geometry of SWCNT microelectrodes is not only useful for investigating kinetics of electron transfer, but also promising candidate in electrochemical sensors application.