Direct deconvolution approach for depth profiling of element concentrations in multi-layered materials by confocal micro-beam X-ray fluorescence spectrometry

A new approach for the determination of element concentration profiles in stratified materials by confocal X-ray fluorescence spectrometry was elaborated. The method was based on a direct deconvolution of the measured depth-dependent X-ray fluorescence intensity signal with the established response function of the spectrometer. Since the approach neglects the absorption of primary and secondary radiation within the probing volume, it is applicable only to low absorbing samples and small probing volumes. In the proposed approach the deconvolution is performed separately for all detectable elements and it is followed by the correction of absorption effects. The proposed approach was validated by using stratified standard samples. The determined elemental profiles were compared with the results obtained by using existing analytical approaches.