Hybrid model for a cylindrical hollow cathode glow discharge and comparison with experiments

Some of the fundamental characteristics of the hollow cathode glow discharge are presented for different discharge conditions, based on a hybrid Monte Carlo fluid model, and on electrical and spectroscopic measurements. The Monte Carlo model describes the movement of the fast electrons as particles, while in the fluid model, the slow electrons and positive ions are treated as a continuum. The transient continuity equations are solved together with the Poisson equation in order to obtain a self-consistent electric field. The source terms of the continuity equations and the electron multiplication coefficient (used for the determination of the secondary electron emission coefficient) are obtained from the Monte Carlo simulation. These two models are run iteratively until convergence is reached. Typical results are, among others, the charged particles densities, the fluxes, the electric field and potential distribution. It is found that the influence of the bottom of the cylindrical hollow cathode cannot be neglected. A very good agreement between calculations and experimental data was obtained.