Spectroscopic infrared ellipsometry to determine the structure of layered samples

This contribution outlines investigations in our laboratory in the course of developing spectroscopic infrared ellipsometry into an analytical tool for structure elucidation of a given solid sample with one single experimental technique. The term ‘structure’ is meant here to comprise the layer or stack geometry of a sample along with the thicknesses, as well as the optical properties of the individual layers. The latter ones—expressed as optical constants—serve as a basis to characterize the layer material, from the identity of the compound to specific molecular interactions and order. There are no general restrictions as to the physical properties of the materials; the individual layers or films should advantageously be thin enough to transmit infrared radiation at least within spectral windows. The sensitivity of infrared ellipsometry to films as thin as a few nanometers or less is illustrated by experimental examples.