Wavelength dispersive grazing incidence X-ray fluorescence of multilayer thin films

We developed the grazing incidence X-ray fluorescence (GIXRF) technique based on the wavelength dispersive (WD) fluorescence equipment with a high brilliance synchrotron radiation at SPring-8. With a good energy resolution and a high count rate of the WD detector, a high quality data of an incident angle dependence of fluorescence yields for the composition elements were obtained. Data analysis based on the multilayer model has been developed. On the applications of this technique, two examples are discussed. The interfacial completeness has been evaluated for the 10-layer structure of the giant magnetoresistance (GMR) multilayer. On the other hand, the diffusion of atoms at interface has been evaluated for the Ta2O5 metal gate structures.