Title of article :
Sputtering: the material erosion tool
Author/Authors :
Murty، نويسنده , , M.V.Ramana، نويسنده ,
Issue Information :
هفته نامه با شماره پیاپی سال 2002
Abstract :
The erosion of materials with energetic ions is an indispensable tool in the laboratory and the industry. The ion–solid collision process leading to the ejection of atoms contains fascinating physics and materials science of surfaces. In this article, different aspects of sputtering relevant to applications are discussed. Current research is emphasized and future directions are outlined.
Keywords :
Sputter deposition , Ion etching , morphology , surface structure , Roughness , and topography , sputtering , Secondary ion mass spectroscopy
Journal title :
Surface Science
Journal title :
Surface Science