Calculation of the contribution of scattering effects to X-ray fluorescence intensity for coating samples

Theoretical equations to calculate fluorescence intensity enhanced by scattering effects for coating samples were developed based on fundamental parameter models. The secondary enhancement by scattering radiation from the same layer or between layer and substrate and the primary fluorescence that was scattered into the direction of detector by atoms in layer and substrate were included in calculations. The contributions of different scattering effects to fluorescence intensity were calculated for a hypothetical Zn coating on infinite Fe substrate sample. The results show that the contributions of scattering effects to fluorescence intensity are related to the thickness of coating and are up to several percents of primary fluorescence intensity.