Time-resolved measurement of emission profiles in pulsed radiofrequency glow discharge optical emission spectroscopy: Investigation of the pre-peak

Radiofrequency glow discharge coupled to optical emission spectroscopy has been used in pulsed mode in order to perform a detailed study of the measured temporal emission profiles for a wide range of copper transitions. Special attention has been paid to the early emission peak (or so-called pre-peak), observed at the beginning of the emission pulse profile. The effects of the important pulse parameters such as frequency, duty cycle, pulse width and power-off time, have been studied upon the Cu pulse emission profiles. The influence of discharge parameters, such as pressure and power, was studied as well. s have shown that the intensity observed in the pre-peak can be 10 times as large as the plateau value for resonant lines and up to 5 times in case of transitions to the metastable levels. Increasing pressure or power increased the pre-peak intensity while its appearance in time changed. The pre-peak decreased when the discharge off-time was shorter than 100 μs. According to such results, the presence of the pre-peak could be probably due to the lack of self-absorption during the first 50 μs, and not to the ignition of the plasma. Under the selected operation conditions, the use of the pre-peak emission as analytical signals increases the linearity of calibration curves for resonant lines subjected to self-absorption at high concentrations.