Title of article
Influence of step edge diffusion on surface morphology during epitaxy
Author/Authors
Ramana Murty، نويسنده , , M.V. and Cooper، نويسنده , , B.H.، نويسنده ,
Issue Information
هفته نامه با شماره پیاپی سال 2003
Pages
8
From page
91
To page
98
Abstract
The role of step edge diffusion in epitaxy is discussed using kinetic Monte Carlo simulations. Three models with different rates of edge diffusion are investigated. Increasing the rate of edge diffusion results in an early onset of second layer nucleation, pattern formation in thick films, and increased surface roughness. An expression for the uphill current due to edge diffusion is derived in the limit of fast edge diffusion.
Keywords
surface diffusion , epitaxy , Monte Carlo simulations
Journal title
Surface Science
Serial Year
2003
Journal title
Surface Science
Record number
1683538
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