Optical and morphological properties of N-doped TiO2 thin films

Nitrogen doped titanium dioxide (TiO2) thin films were deposited by RF magnetron sputtering onto various substrates. The films were prepared in plasma of argon, oxygen, and nitrogen, with varying the nitrogen content, from 0% up to 70%. The resulting TiOx–Ny films were found to consist of cubic TiN osbornite and tetragonal TiO2 rutile phases. Using optical spectroscopy with large spectral range from 350 to 1000 nm, the band gap width was determined and a narrowing of the optical gap from 2.76 to 2.32 eV was observed as a function of the N-content. It was found that the optical properties of the TiOx–Ny layers are influenced by the surface morphology, roughness, surface energy and phase content. The chemical composition, the crystalline structure, the surface morphology and the surface energy were thoroughly studied by the Rutherford backscattering spectrometry (RBS), grazing-angle XRD, atomic force microscopy (AFM) and contact angle measurements (wettability), respectively.