Wetting and reactive thin film growth

The wetting process of the GaN(0 0 0 1) surface by Ga is studied in situ in real time by low energy electron microscopy and diffraction. The reversibility of the phase transitions in the wetting layer is examined in detail and the consequences for the growth of GaN layers by reaction with ammonia and activated nitrogen are discussed. It is concluded that the growth of smooth (0 0 0 1)-terminated GaN layers may be considered as quasi-liquid phase epitaxy.