EELS study of Rh particle growth on ZrO2 substrate with different deposition conditions

Electron energy loss spectroscopy (EELS) and Auger electron spectroscopy (AES) have been used to monitor the formation of Rh films on ZrO2(1 0 0) single crystalline substrates. Rhodium was evaporated step by step at various substrate temperatures. The surface morphology of the deposited material influences EELS spectra, so that the relative metal coverage of the substrate can be calculated. The EELS and AES results were compared and the conclusions concerning the deposit morphology were verified by means of transmission electron microscopy.