Title of article :
Sn thin film growth on Si(1 1 1) surface studied by CAICISS
Author/Authors :
Ryu، نويسنده , , J.T and Katayama، نويسنده , , M and Oura، نويسنده , , K، نويسنده ,
Issue Information :
هفته نامه با شماره پیاپی سال 2002
Abstract :
Using coaxial impact–collision ion scattering spectroscopy, we have investigated Sn thin film growth on Si(1 1 1)7×7 and Si(1 1 1)√3×√3–Sn surfaces at room temperature. Sn grows epitaxially with body-centered-tetragonal structure (β-Sn) both on Si(1 1 1)7×7 surface and √3×√3-Sn surface. However, these epitaxial Sn layers exhibit markedly different growth orientations; the Sn layers on the Si(1 1 1)7×7 substrates have β-Sn(1 0 0)〈0 1 1〉//Si(1 1 1)〈0 1̄ 1〉 and β-Sn(1 0 0)〈0 1 0〉//Si(1 1 1)〈1̄ 1̄ 2〉 orientations, while those on the √3×√3-Sn surface have β-Sn(1 0 0)〈0 1 0〉// Si(1 1 1)〈0 1̄ 1〉 and β-Sn(1 0 0)〈0 1 1〉// Si(1 1 1)〈1̄ 1̄ 2〉 ones. These results reveal that the growth orientation of the epitaxial Sn layers is rotated by 30° with regard to that on a clean Si(1 1 1) surface by the presence of the √3×√3-Sn phase at the initial stage of the Sn growth.
Keywords :
Ion scattering spectroscopy , surface structure , Roughness , Polycrystalline thin films , Silicon , Low energy ion scattering (LEIS) , TIN , GROWTH , and topography , Metallic films , morphology
Journal title :
Surface Science
Journal title :
Surface Science