Energy loss spectra of low primary energy (E0 ⩽ 1 keV) electrons backscattered by silicon dioxide

A Monte Carlo simulation is described and utilized to calculate the energy distribution spectra of the electrons backscattered by silicon dioxide. Spectra are presented for incident energies of 250 eV, 500 eV, and 1000 eV. Spectra interpretation is based on a semiquantitative valence-band structure model for SiO2 crystals.