Structure, composition and crystallinity of epitaxial magnetite thin films

Epitaxially-grown Fe3O4(0 0 1) thin films by reactive deposition on MgO(1 0 0) substrates were studied using low-energy electron diffraction (LEED), conversion electron Mِssbauer spectroscopy (CEMS), Rutherford backscattering spectrometry (RBS), channeling (RBS-C) experiments and X-ray reflectometry (XRR). No visible influence from the ion irradiation of the samples on the CEMS spectra was found, while surface oxidation of the samples was observed after exposure to the atmospheric pressure. RBS analysis indicated the presence of magnesium with an average amount of 3% in the films. RBS-C experiments yielded a value of 22% for the minimum yield of Fe and a value of 0.62° for the half-angle for Fe in the film indicating a good crystal quality of the films. The value for film-thickness obtained from XRR is in a good agreement with that from RBS and the nominal value.