Title of article
Ab initio molecular orbital study on atmosphere-sensitive characteristics of the alternate supply OMVPE growth of ZnSe
Author/Authors
Hayashi، نويسنده , , Keiji and Omote، نويسنده , , Noriyoshi and Kanayama، نويسنده , , Takuo، نويسنده ,
Issue Information
هفته نامه با شماره پیاپی سال 2004
Pages
3
From page
165
To page
167
Abstract
An insight into surface chemical reactions responsible for the organometallic vapor phase epitaxial (OMVPE) growth of ZnSe under the alternate supply of diethylzinc (DEZn) and dimethylselenium (DMSe) was provided by theoretical interpretation of our previous experimental results. Based on a quantum chemical study, atmosphere-sensitive characteristics of ZnSe growth were attributed to differences in the pathways and the corresponding adiabatic potential barriers between diethylzinc chemisorption onto hydrogen- and methyl-terminated Se-stabilized ZnSe surfaces.
Keywords
Surface chemical physics , In situ surface monitoring , Ab initio molecular orbital methods , Organometallic vapor phase epitaxy , Wide-bandgap semiconductor
Journal title
Solid State Ionics
Serial Year
2004
Journal title
Solid State Ionics
Record number
1716507
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