Title of article :
A novel negative photoinitiator-free photosensitive polyimide
Author/Authors :
Jiang، نويسنده , , Xuesong and Li، نويسنده , , Hao and Wang، نويسنده , , Hongyu and Shi، نويسنده , , Zixing and Yin، نويسنده , , Jie، نويسنده ,
Issue Information :
دوهفته نامه با شماره پیاپی سال 2006
Abstract :
A novel negative photoinitiator-free photosensitive polyimide (PFPS–PI) was synthesized through introducing the photosensitive 4,4-bis[(4-amino)thiophenyl] benzophenone (BATPB) into backbone chain and methyl acrylate group into side-chain of the polyimide, respectively. Photosensitive properties study revealed its good photolithographic properties, with a resolution about 5 μm and a sensitivity of 150 mJ/cm2.
Keywords :
Photosensitive , polyimide , Photoinitiator-free
