Title of article
RF magnetron sputtering SnO2: Sb films deposited on organic substrates
Author/Authors
Ma، نويسنده , , Jin and Hao، نويسنده , , Xiaotao and Ma، نويسنده , , Honglei and Xu، نويسنده , , Xiangang and Yang، نويسنده , , Yingge and Huang، نويسنده , , Shulai and Zhang، نويسنده , , Deheng and Cheng، نويسنده , , Chuanfu، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2002
Pages
5
From page
345
To page
349
Abstract
Transparent conducting antimony-doped tin oxide (SnO2: Sb) films have been prepared on polyimide (PI) substrates by rf magnetron sputtering technique at low substrate temperature (30–220 °C). Polycrystalline Sb-doped SnO2 films having rutile structure with resistivity as low as 3.7×10−3 Ω cm were deposited on a PI substrate. The average transmittance for films deposited on PI with 285 nm thickness exceeded 70% in the visible range. The properties for the films deposited on organic substrates were studied in detail.
Keywords
A. Transparent conducting films , A. Organic substrate , B. RF magnetron sputtering
Journal title
Solid State Communications
Serial Year
2002
Journal title
Solid State Communications
Record number
1761896
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