Amorphous silicon thin-film negative electrode prepared by low pressure chemical vapor deposition for lithium-ion batteries

Thin-film amorphous silicon (a-Si) microbattery anodes are fabricated by low pressure chemical vapor deposition (LPCVD) using Si2H6 as source gas. The high reversible capacity and cycle performance are presented. Galvanostatic charge-discharge test of half cells were performed. Thin-film amorphous silicon anodes exhibited the highest reversible capacity (4000 mAh/g), which is about 95% of the theoretical capacity in case of Li22Si5. The cyclability was enhanced by controlling the lower voltage limit or by reducing the amount of cycled charge quantity. The thin-film silicon anodes can successfully be coupled with thin-film LiMn2O4 cathodes, confirming that batteries have output voltage of 3.0–3.8 V and good cyclic durability.