Preparation of hydrogenated diamond-like carbon films on conductive glass from an organic liquid using pulsed power

Hydrogenated diamond-like carbon (DLC) films were deposited on conductive glass from acetonitrile by liquid deposition using a pulse-modulated source at room temperature. The structure of the films was characterized by XPS, Raman and IR spectroscopy. The deposits were hydrogenated amorphous DLC films. The films have high transmission ratio (>70%) in the range of 330∼2000 nm with VIS/UV spectroscopy. The resistivity of the films was of the order of 1010 Ω·cm.