GeHx (x=0–3) and GenHx (n=2–7) in flash pyrolysis of GeH4

Gas-phase thermal decomposition of germane, GeH4, has been studied using a flash pyrolysis technique (∼20 μs reaction time), coupled with a vacuum-ultraviolet (VUV) photoionization time-of-flight mass spectrometer (TOFMS). Pyrolysis temperatures ranged from 685 to 1500 K, and resulted in the formation of GeH2 above 900 K and GeHx (x=0,1,3) above 1100 K. In addition, Gen (n=2–7) and a small amount of highly unsaturated hydrogenated GenHx (n=2–7) clusters were observed above 1100 K.