Author/Authors :
Iwata، نويسنده , , Yasushi and Kishida، نويسنده , , Masaaki and Muto، نويسنده , , Makiko and Yu، نويسنده , , Shengwen and Sawada، نويسنده , , Tsuguo and Fukuda، نويسنده , , Akira and Takiya، نويسنده , , Toshio and Komura، نويسنده , , Akio and Nakajima، نويسنده , , Koichiro، نويسنده ,
Abstract :
We have developed a new laser ablation type cluster source named `spatiotemporal confined cluster sourceʹ (SCCS), which gives well-defined thermo-dynamical conditions for cluster growth with narrow size dispersion. A laser-induced shock is controlled to produce a definite mixed gas layer of the silicon vapor and helium gas, which is locally confined in a sub millimeter space, and conserved densely for a time of 160 μs. The generated silicon clusters, which are ionized by an ArF excimer laser for mass analysis without dissociation, show narrow size dispersion with characteristically higher abundance of stable Si23Hx (46%), Si19Hx (14%), and Si21Hx (12%) clusters.
