Compositional profiling of solution-deposited lead zirconate–titanate thin films by radio-frequency glow discharge atomic emission spectroscopy (rf-GD-AES)

Depth-resolved elemental analysis of perovskite thin films based on lead zirconate–titanate (PZT) is performed by a relatively new technique; radio-frequency glow discharge atomic emission spectroscopy (rf-GD-AES). The technique provides in-depth composition information for the PZT layer, and underlying layers within the device architecture. Total film thicknesses of ∼1 μm are profiled in <30 s. Differences in pyrolysis conditions for two sol–gel produced films are easily identified based on the profiles of residual C, H, and O species. The technique is projected to be a valuable aid in the development of new electronic devices.