Structural and dielectric properties of mesoporous silsesquioxane films

Mesoporous low dielectric constant films were successfully synthesized by covalently binding poly(amidoamine) (PAMAM) templating polymer to a hydrogen methyl silsesquioxane matrix via a coupling agent. The decomposition behavior of PAMAM was studied in different atmospheres and it was found that PAMAM degraded more effectively in air than in nitrogen. The physical, structural and dielectric properties of the mesoporous films were studied as a function of concentration of the templating polymer. The dielectric constant about 2.06 could be obtained with pore size less than 10 nm for a film with 20 wt% loading of the sacrificial polymer.