Dissociative electron attachment to CHF2Cl

We present results of a crossed electron/molecule beams study concerning dissociative electron attachment (DEA) to CHF2Cl. This study was performed in the electron energy range from about 0–10 eV and at a gas temperature of 300 K. Four fragment negative ions (Cl−, F−, CClF− and CF2−) were observed. The following partial absolute cross-sections for DEA to CHF2Cl were obtained, 2×10−19 cm2 at the 1.1 eV resonance for Cl−, 3×10−20 cm2 at the 3.4 eV resonance for F−, ≈2×10−21 at the 3.0 eV resonance for CClF− and ≈3×10−21 at the 8.6 eV resonance for CF2−. Using the cross-section functions obtained, total rate coefficients for DEA to CHF2Cl were calculated giving a value of 9.0×10−13 cm3s−1 at room temperature. Present results are compared with previous data allowing thus to clarify existing discrepancies.