Title of article :
Capacitive discharge mode transition in moderate and atmospheric pressure
Author/Authors :
Moon، نويسنده , , Se Youn and Rhee، نويسنده , , J.K. and Kim، نويسنده , , D.B. and Gweon، نويسنده , , B.M. and Choe، نويسنده , , W.، نويسنده ,
Issue Information :
دوماهنامه با شماره پیاپی سال 2009
Abstract :
Current–voltage characteristics of α- and γ-modes were investigated in moderate and atmospheric pressure capacitive discharges. The α- and γ-modes, the co-existence of both modes, and the α- to γ- and γ- to α-mode transitions were observed with the changes in voltage, current, and plasma volume. Changing of gas pressure, (100–760) Torr, the α to γ and the γ to α transition occurred with respect to input power increasing and decreasing, respectively. The hysteresis in current and voltage curve was observed and became more evident at higher pressure. Using a simple electrical circuit model, the relation between the gas pressure and the α-sheath thickness before mode transition was described.
Keywords :
Atmospheric pressure plasma , 52.80.Pi , Discharge mode , 52.77.Fv , 52.50.Qt , Mode transition
Journal title :
Current Applied Physics
Journal title :
Current Applied Physics