Author/Authors :
Sekhar، نويسنده , , Koppole C. and Key، نويسنده , , Sung Hun and Hong، نويسنده , , Kyung Pyo and Han، نويسنده , , Chan Su and Yook، نويسنده , , Jong Min and Kim، نويسنده , , Dong Soo and Kim، نويسنده , , Jun Chul and Park، نويسنده , , Jong Chul and Cho، نويسنده , , Yong Soo، نويسنده ,
Abstract :
The thickness-dependent dielectric properties and tunability of pulsed laser deposited (Ba0.5Sr0.5)0.925K0.075TiO3 (BSKT) thin films with different thickness ranging from 80 to 300 nm has been investigated. Dielectric properties of the BSKT thin films are substantially improved as the BSKT film thickness increases, which can be explained by the model of a low-permittivity dead layer that is connected in series with the bulk region of the film. The estimated values of thickness and the average dielectric constant for the dead layer are 2.4 nm and 23.5, respectively, in a Pt/BSKT/Pt capacitor structure. The tunability and figure of merit increased with increasing film thickness, which are attributed to the change in lattice parameter and the dead layer effect.
Keywords :
BaSrTiO3 , Tunability , Film Thickness , dielectric
