A micro/nanocasting method for replicating soft micro/nanosurface structures using a dynamic electrical field

We propose a new electric field-induced micro/nanocasting method to replicate soft patterns using micro/nanocasting techniques without pressure. The process uses an alternating current (AC) electrical field and rotation of one electrode, generating a dynamic electrical field that induces electrokinetic flow motion in a dielectric solution (polydimethylsilane, PDMS). We used a lotus leaf as a replication template and characterised the PDMS flow motion to observe the effects of various process parameters (e.g., electrical field strength, rotation speed of an electrode, and electrode shape). The unstable flow motion was significantly dependent on the processing parameters, especially the rotation speed of the electrode. Using the optimised processing conditions, the replication efficiency was about 88%. We believe that this method has potential for fabricating soft micro/nanosized structures.