Design of electrostatically actuated MEMS switches

In this paper, we present mechatronic design and analysis of radio-frequency (RF) microelectromechanical system (MEMS) switches with rectangular, taper, and meandering connection beam structures. The mechatronic design and analysis of the RF MEMS switches are based on both the finite element method and the full-wave electromagnetic simulation. The mechanical characteristics of the RF MEMS switches including displacement, stress, and nature frequency are studied. The electronic characteristics of the switches investigated include insertion loss, return loss, and isolation. The comprehensive mechatronics study of the RF MEMS switches provides a systematic design and analysis methodology for MEMS applications.