Title of article
Enhanced interfacial roughness in metallic multilayers prepared by pulsed cathodic arc deposition
Author/Authors
Chun، نويسنده , , Sung-Yong and Chayahara، نويسنده , , Akiyoshi، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2000
Pages
3
From page
281
To page
283
Abstract
The interfacial roughness of Fe/C multilayers with individual layer thicknesses from a few angstroms to a few tens of angstroms, fabricated using a pulsed cathodic arc, have been studied by cross-sectional transmission electron microscopy (XTEM) and atomic force microscopy (AFM). Very thin perfect 100-period Fe/C multilayers were prepared with flat and smooth interfaces in the sub-nanometer range by a high degree of ionization of the pulsed plasma.
Keywords
Pulsed cathodic arc , Transmission electron microscopy , Multilayers , Interfacial roughness , Atomic force microscopy
Journal title
Surface and Coatings Technology
Serial Year
2000
Journal title
Surface and Coatings Technology
Record number
1799112
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