Ion beam assisted deposition of Al2O3 optical waveguides on silicon

In the present paper, we report on the synthesis of Al2O3 optical waveguides by ion beam assisted deposition (IBAD). Al2O3 films with and without erbium doping have been synthesized. The films are transparent in the wavelength range of visible and infrared light. The transparency and refractive index are thermally stable. All of the films obtained with various methods are OH free. The advantages and disadvantages of various IBAD methods to fabricate Er-doped Al2O3 film have been compared and are discussed. Further optimizing procedures for Er-doped Al2O3 film deposition are also discussed in the paper.