Title of article
Multilayer CNx/TiN composite films prepared by multi-arc assisted DC reactive magnetron sputtering
Author/Authors
Liu، نويسنده , , C.S. and Wu، نويسنده , , D.W. and Fu، نويسنده , , D.J. and Ye، نويسنده , , M.S and Gao، نويسنده , , P. and Peng، نويسنده , , Y.G and Fan، نويسنده , , X.J.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2000
Pages
6
From page
144
To page
149
Abstract
We incorporated the multi-arc discharge in a reactive magnetron sputtering system to produce alternating CNx/TiN coatings. X-ray photoelectron spectrometry (XPS) measurements showed that the carbon nitride was formed and the N content was between 12 and 40 at.% in the CNx films. The microstructure of the films was studied by atomic microscopy (AFM) and transmission electron diffraction (TED). There were β-C3N4 and c-C3N4 phases in the films. Under appropriate deposition conditions, alternating CNx/TiN coatings with high hardness, low friction coefficient and good adhesion were obtained on high-speed tool steel (HSS) substrates.
Keywords
microstructure , Carbon nitride , mechanical properties
Journal title
Surface and Coatings Technology
Serial Year
2000
Journal title
Surface and Coatings Technology
Record number
1799216
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