A homogeneous microwave plasma and its application in material surface modification

Homogeneous microwave plasmas have been produced and used for material surface modifications. This paper has presented the results of new 160-mm homogeneous plasmas produced at the pressure of 10-600 Pa. Also, the axial distributions of plasma parameter have been investigated, with and without the short circuit at the top of the set-up, respectively. The experimental results showed that the short circuit was efficient for the plasma density being raised and beneficial for plasma uniformity. The surface modifications of PTFE samples and the nitridation of 38CrMoAl indicated that the surface modifications could be made efficiently by this homogenous microwave plasma.