Polymer modification by MEVVA source deposited and ion implantation

Polyethylene terephthalate (PET) has been modified by Ti, Ni and W deposition using a metal vapor vacuum arc (MEVVA) source and implantation. The surface resistance of deposited PET could decrease to several hundred ohms. The adhesion of metal coating on polymers is very strong. The thickness of the deposited metal coating could be controlled from tens of nanometers to 1 μm. The hardness for thick Ti and W deposited PET is 3.81 and 2.54 GPa, which are several times greater than that of PET. The elastic modulus of deposited PET increases also. Similar results have been observed for other metal implanted PET. The thickness and atomic distribution of deposited metal coating was analyzed using RBS. The surface structure has varied after deposition and implantation. It is believed that the change would cause the improvement of the conductive properties and wear resistance.