Experimental investigation of plasma dust and plasma polymerization

Plasma dust can be one product of plasma polymerization. When polymerization occurs on the surface of a substrate, the product is a film; when polymerization occurs in the plasma volume, the product is plasma dust. Film and dust are different products with different chemical and physical characteristics. Plasma dust is composed of many small spheres with diameters ranging from 0.2 to 0.5 μm.