Shunting arc as a pulsed ion source for solid-state materials for plasma-based ion implantation

Shunting arc is an alternating capacitor discharge along a rod of solid-state materials. Optimization of the discharge condition has realized self-ignition of the arc discharge with low input power to the rod, leading to a much longer rod lifetime than in conventional shunting arcs or peripheral arcs. The shunting-arc-produced plasma contains mainly the ions of the solid-state material. Ion extraction from the plasma is demonstrated. Thus, the shunting arc works as a pulsed ion source for solid-state materials for plasma-based ion implantation (PBII) and ion processing.