Title of article
Diamond-like carbon films prepared by filtered arc deposition for electron field emission application
Author/Authors
Mao، نويسنده , , D.S. and Li، نويسنده , , W. and Wang، نويسنده , , X. and Liu، نويسنده , , X.H.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2001
Pages
5
From page
1
To page
5
Abstract
In this paper, hydrogen-free diamond-like carbon (DLC) films were prepared by filtered arc deposition. The effect of sp3 content and annealing on electron field emission properties of the DLC films was studied. A patterned DLC flat thin film column emitter array was fabricated by oxygen reactive ion beam etching (RIBE) technique. It was shown that the threshold field of the DLC films was approximately 3–15 V/μm. Field emission site density ranged from 5×102 to 2×103 /cm2. The field emission mechanism of the DLC films is also discussed.
Keywords
Diamond-like carbon , Filtered arc deposition , electron field emission , Reactive ion beam etching
Journal title
Surface and Coatings Technology
Serial Year
2001
Journal title
Surface and Coatings Technology
Record number
1800755
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