Silicon deposition on AISI 304 stainless steel by CVD in fluidized bed reactors: analysis of silicide formation and adhesion of coatings

Silica/mullite multilayers are designed to protect materials against high temperature corrosion. The deposition of these multilayer systems is performed using CVD in a fluidized bed reactor (CVD-FBR). The preliminary results of silicon layers deposited onto AISI 304 stainless steel by CVD-FBR obtained at 450°C for different processing times are presented in the present paper. Moreover, the effect of subsequent thermal treatments on the formation of brittle silicides has been studied. The relationship between coatings process, heat treatments and mechanical adhesion is established.