Title of article
Effect of plasma inhomogeneity on grid performance
Author/Authors
Tartz، نويسنده , , M. and Deltschew، نويسنده , , R. and Hartmann، نويسنده , , E. and Neumann، نويسنده , , H.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2001
Pages
5
From page
34
To page
38
Abstract
In broad-beam ion sources an inhomogeneous plasma distribution has a strong effect on the maximum extractable ion current, the broad-beam profile and the grid lifetime. Two methods for the determination of the plasma density profile at the sheath are described and tested with two ion sources of different size and plasma excitation mode. It is demonstrated that the description of the broad-beam profiles can be significantly improved by taking into account the plasma profile.
Keywords
Plasma simulation and modelling , Broad-beam ion source
Journal title
Surface and Coatings Technology
Serial Year
2001
Journal title
Surface and Coatings Technology
Record number
1801349
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