Title of article :
Transparent, conductive ZnO:Al thin film deposited on polymer substrates by RF magnetron sputtering
Author/Authors :
Fortunato، نويسنده , , E. and Nunes، نويسنده , , P. and Marques، نويسنده , , A. and Costa، نويسنده , , D. and ءguas، نويسنده , , H. and Ferreira، نويسنده , , I. and Costa، نويسنده , , M.E.V. and Godinho، نويسنده , , M.H and Almeida، نويسنده , , P.L. and Borges، نويسنده , , J.P. and Martins، نويسنده , , R.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2002
Pages :
5
From page :
247
To page :
251
Abstract :
In this paper, we present the optical, electrical, structural and mechanical properties exhibited by aluminum-doped zinc oxide (ZnO:Al) thin films produced by RF magnetron sputtering on polymeric substrates (polyethylene terephthalate, PET; Mylar type D from Dupont®) with a standard thickness of 100 μm. The influence of the uniaxial tensile strain on the electrical resistance of these films was evaluated in situ for the first time during tensile elongation. In addition, the role of the thickness on the mechanical behavior of the films was also evaluated. The preliminary results reveal that the increase in electrical resistance is related to the number of cracks, as well as the crack width, which also depends on the film thickness.
Keywords :
mechanical properties , Polymeric substrates , Zinc oxide thin film , RF magnetron sputtering
Journal title :
Surface and Coatings Technology
Serial Year :
2002
Journal title :
Surface and Coatings Technology
Record number :
1803321
Link To Document :
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