Study of ion-impact oxygen desorption by computer simulation

The ion-impact desorption processes of oxygen molecules adsorbed with a C(2×2) structure onto a Ag (110) surface at a parallel alignment of an axis of molecules along the 〈110〉 direction have been investigated by computer simulation. The angular distributions and desorption yields of dissociative and non-dissociative desorbed molecules have been calculated at a grazing 5 keV He+, N+ and Ne+ ion bombardment. It is shown that in the case of a grazing incidence, the non-dissociative (molecular) desorption yield is a noticeable magnitude.