Deposition of multi-period low-emissivity filters for display application by RF magnetron sputtering

Three types of low emissive (low-e) filters for the display application based on the structure of [TiO2∣Ti∣Ag∣TiO2] were deposited by the RF magnetron sputtering method. The optical and electrical performances of the filters were examined by the measurements of transmittance and reflectance with a spectrophotometer and sheet resistance with a four-point probe meter. Also, the physical and chemical states were investigated by the scanning electron microscopy (SEM) and Auger electron spectroscopy (AES). The results suggest that multiple repetition of the basic structure can be used for a display application in that the transmittance of three periods of [TiO2∣Ti∣Ag∣TiO2] can be drastically reduced in the near IR and the sheet resistance can be low enough to shield the electromagnetic waves.