Preparation, microstructural characterisation and tribological behaviour of CNx coatings

A review is presented on the main results obtained during the last years on the synthesis and microstructural characterisation of CNx and Si-doped CNx coatings prepared mainly by the magnetron sputtering technique. An exhaustive characterisation by XPS, EELS, IR, XAS and NMR has allowed us to determine the microstructure of the films obtained under different experimental conditions and with different compositions. Thermal stability studies in vacuum and air atmosphere provided also a temperature limit for the practical use of the films. Finally, the relationships between the nature of the films and the friction behaviour are highlighted and discussed.