Concentration profiles of ion exchanged optical waveguides in glass: analysed in hollow cathode plasma

In this study the possibility of hollow cathode discharge for depth profiling of optical waveguides is demonstrated. Planar optical waveguides fabricated by Ag+–Na+ and K+–Na+ ion exchange processes in glasses are studied. The depth profiles of ion concentrations in these optical waveguides are determined by layer-by-layer emission spectral analysis in hollow cathode plasma. The results agree with ion concentration profiles obtained by method based on refractive index profiles.