Preparation of RuO2–YSZ nano-composite films by MOCVD

RuO2–yttrium stabilized zirconia (YSZ) nano-composite films were prepared by MOCVD on YSZ substrates and their electrical properties were investigated by AC impedance spectroscopy. The composite films consisted of RuO2 and YSZ particles both several tens of nanometer in diameter. The electrical conductivity at the RuO2–YSZ interface increased with increasing RuO2 content up to 20–25 vol.% RuO2 and became constant at more than 30 vol.% RuO2. The emf values of the oxygen concentration cell constructed from the RuO2 film electrode and YSZ electrolyte showed the Nernstian theoretical values at 650 °C.