Coating and ion implantation to the inner surface of a pipe by metal plasma-based ion implantation and deposition

This article describes the characteristics of the coating of the inner surface of a pipe using plasma-based ion implantation and deposition method with a d.c. titanium-cathodic-arc in nitrogen gas. It was confirmed that the coating of the inner surface of the pipe with titanium nitride film was possible by using this method. The film structure and preferential orientation can be controlled by the applied voltage to the pipe. The film on the inner surface of a pipe in its entrance region showed an oriented columnar grain structure oblique to the substrate. The surface morphology changed with the waveform of the applied voltage. These characteristics were closely related to the dynamic behavior of the ions.