Title of article :
Mechanical properties of (Ti,Cr)N coatings deposited by inductively coupled plasma assisted direct current magnetron sputtering
Author/Authors :
Jung، نويسنده , , D.H. and PARK، نويسنده , , H.S. and Na، نويسنده , , H.D. and Lim، نويسنده , , J.W and Lee، نويسنده , , J.J. and Joo، نويسنده , , J.H.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2003
Abstract :
(Ti,Cr)N coatings were deposited by inductively coupled plasma (ICP) assisted magnetron sputtering and the properties of the coatings were investigated. The (Ti,Cr)N coatings deposited by ICP assisted sputtering showed a much higher micro-hardness (>5000 HK0.01) compared to coatings produced by the conventional DC magnetron sputtering method. The ICP deposited (Ti,Cr)N coatings also showed superior properties in adhesion and wear compared to the DC sputtered (Ti,Cr)N coatings. The superior mechanical properties of ICP deposited (Ti,Cr)N coatings were attributed to the fine and dense micro-structure and high compressive residual stress.
Keywords :
ICP sputtering , (Ti , Cr)N , Hardness , Protective coating
Journal title :
Surface and Coatings Technology
Journal title :
Surface and Coatings Technology
