Author/Authors :
Soukup، نويسنده , , L. and Hubi?ka، نويسنده , , Z. and Churpita، نويسنده , , A. and ?ada، نويسنده , , M. and Pokorny، نويسنده , , P. and Zemek، نويسنده , , J. and Jurek، نويسنده , , K. and Jastrab??k، نويسنده , , L.، نويسنده ,
Abstract :
An atmospheric pressure RF torch-barrier discharge system with flowing plasma jet channel was studied as a tool for coatings of aluminum substrates by CeOx thin films. Cerium precursors were supplied to the plasma jet in the form of aerosol of the water solution of cerium salts. CeOx thin films were obtained on the Al substrate at certain deposition conditions. Properties of deposited CeOx films were studied by electron microprobe system. Surface of the films was analyzed by XPS method. ‘In situ’ emission spectroscopy of active plasma jet channel was performed in order to obtain more parameters about atmospheric plasma jet channel.
