Depth profiles study of n(TiN+AlN) bilayers systems by GDOES and RBS techniques

Some n(TiN+AlN) bilayers systems with n=1 and n=2 are realised by reactive magnetron cathodic sputtering. Different layers and interfacial zones are studied by glow discharge optical emission spectroscopy (GDOES) and Rutherford backscattering spectroscopy (RBS). With GDOES analysis, it is possible to check the bilayers number in each system, the total thickness of coating and the bilayerʹs thickness. It is also possible to compare the thickness and the roughness of interfacial zone. The higher the slope is, the less rough is the interfacial zone. A great quantity of oxygen is present, mainly in interfacial zones, when any ion bombardment is not applied. This oxygen is nearly completely eliminated, when an ion bombardment is applied during the coatingʹs elaboration. This contamination is confirmed by the stoichiometryʹs determination of different layers of bilayers systems, with some RBS analyses. These RBS analyses show the interfacial roughness owing to the disagreement between the experimental points and the simulation points. To obtain a good fitting, we should simulate, in case of (TiN+AlN) systems, an additional layer, which plays the role of interfacial layer. When an ion bombardment is applied during sputtering deposition, the interfaces are well-defined and without oxygen. For 2(TiN+AlN) systems, the interfaces also appear very rough without ion bombardment.