Deposition of fluorocarbon polymer films in a dielectric barrier discharge (DBD)

Investigations of an intermittent dielectric barrier discharge in fluorocarbon mixtures at atmospheric pressure are reported. Plasma diagnostics were performed by FTIR-absorption spectroscopy as well as by emission/absorption spectroscopy in the UV/VIS range. Deposited polymer films were investigated by FTIR absorption spectroscopy, XPS, SEM and surface energy measurements. The results of the film property measurements show a correlation to the results of plasma diagnostics.